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      (Surface inspection equipment, defect inspection equipment)

      Equipment to perform macro surface inspections for thin-plate-like workpieces with high precision and speed. All transparent, semi-transparent and non-transparent workpieces can be measured, such as silicon wafers, compound wafers.
      Its unique optical system employs edge-reflected light and Mie scattering, and achieves the highest level of sensitivity for macro inspections with a line sensor camera exclusively for ultra-low noise and an optimized telecentricity optical system.
      It can also check for uneven film thickness, in addition to fine surface defects of nano-meter order. For applications such as defect classifications, please consult us.

      Applications

      • Surface inspection of silicon wafers
      • Surface inspection of nanoimprinted substrates
      • Surface inspection of photolithographic-processed substrates
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      For Inquiries About This Product
      • Company:
        Shin-Etsu Engineering Co., LTD.
      • Department:
        Electro-Mechanics Division
      • Email:
        systeminfo@see.jp
          金沙登录网址5341293619482395
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